OPUS3 SH
OPUS3 SH is the only prober in the market which handles 6”, 8” and 12” SEMI Standard wafers, without having any change kit.
It is compact, with high accuracy for consistent contact/probing and fast index time for higher throughput.
Key features Overview
- Compact size for space efficiency
- Fast probe card load & unload by drawer type card changer
- Reliable temperature control
- Stiff and strong z structure
- Map shift prevention
- Real-time recipe validation
- Intelligent pin alignment algorithm
- Smart probing route algorithm
- Compatible with all pogo type of tester
- Flat / Top loader & Automation Avilable.
Specification Overview
| Name | OPUS3 SH |
| Wafer Size | *6 & 8 & 12 inch |
| Dimension | 1490(W) x 1680(D) x 960(H) |
| X, Y Probing Area | X : ±175mm |
| Y : ±175mm | |
| Needle Force | 450kgf |
| XY Accuracy | X : +1.0㎛ |
| Y : ±1.0㎛ | |
| Tri-Temp | COLD: -40℃ / -55℃ |
| HOT: 150℃ / 200℃ | |
| AMBIENT CONTROL (25℃) |