OPUS3 SLT
OPUS3 SLT is the only prober in the market which handles 6",8" and 12" SEMI Standard wafer, without having any change kit.
It is compact, with high accuracy for consistent contact/ probing and fast index time for higher throughput.
It is possible to load universal probe card.
Key features Overview
- Compact size for space efficiency
- Universal probe card changer
- Reliable temperature control
- Stiff and strong Z structure
- Map shift prevention
- Real-time recipe validation
- Intelligent pin alignment algorithm
- Smart probing route algorithm
- Flat loader for smallest foot print
- Compatible with all type of tester
Specification Overview
| Name | OPUS3 SLT |
| Wafer Size | 8 & 12 inch (6”option) |
| Dimension | 1485(W) x 1720(D) x 960(H) |
| X, Y Probing Area | X : ±175mm |
| Y : -175mm, +200mm | |
| Needle Force | 230kgf |
| XY Accuracy | X : ±1.5㎛ |
| Y : ±1.5㎛ | |
| Tri-Temp | COLD -40℃ / -55℃ |
| HOT 150℃ / 200℃ | |
| AMBIENT CONTROL 25℃ |