OPUS3 SD
OPUS3 SD is the only prober in the market which handles 6" & 8" and 12 inch SEMI standard wafers, without having any change kit.
It is compact, with high accuracy for consistent contact/ probing and fast index time for higher throughput.
It is suitable for automation with top loader.
Key features Overview
- Compact size for space efficiency
- Universal probe card changer
- Reliable temperature control
- Stiff and strong Z structure
- Map shift prevention
- Real-time recipe validation
- Intelligent pin alignment algorithm
- Smart probing route algorithm
- Flat loader for smallest foot print
- Compatible with all type of tester
Specification Overview
| Name | OPUS3 SD |
| Wafer Size | *6 & 8 & 12 inch |
| Dimension | 1530(W) x 1782(D) x 960(H) |
| X, Y Probing Area | X : ±180mm |
| Y : ±175mm | |
| Needle Force | 450kgf |
| XY Accuracy | X : +1.0㎛ |
| Y : ±1.0㎛ | |
| Tri-Temp | COLD: -40℃ / -55℃ |
| HOT: 150℃ / 200℃ | |
| AMBIENT CONTROL (25℃) |