OPUS3 ST
OPUS3 ST is the only prober in the market which handles 12 inch SEMI standard wafers & 297mm wafers without having any change kit.
It is compact with high accuracy for consistent probing capability It also provides optimized and fast wafer handling feature for higher wafer handling throughput.
It is suitable for automation with a top loader.
Key features Overview
- Top Loader suitable for Automation (AGV/OHT)
- Compatible with bigger & heavier Probe card by Swing type Card changer
- Intelligent cleaning wafer management algorithm
- Top plate auto tilting for uniformed contact plane
- Reliable temperature control and good heat dissipation
- Stiff and strong Z structure for high force probing
- Compact system size for space efficiency
- Intelligent pin alignment algorithm
- Accurate and powerful probe mark inspection
- Compatible with all type of tester
Specification Overview
| Name | OPUS3 ST |
| Wafer Size | 6* & 8 & 12 inch |
| Dimension | 1700(W) x 2030(D) x 1380(H) |
| X, Y Probing Area | X : ±180mm |
| Y : ±175mm | |
| Needle Force | 450kgf / *750kgf |
| XY Accuracy | X : +1.0㎛ |
| Y : ±1.0㎛ | |
| Tri-Temp | Standard : Room temperature to 150℃ |
| Option : -55℃, Ambient 25℃, 200℃ |